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PeriodicalsMaterials Science

XRD and XPS Analysis of TiO2 Thin Films Annealed in Different Environments

Tamara Potlog·Petru Dumitriu·Marius Dobromir·Dumitru Luca
Journal of Materials Science and Engineering B2014

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Abstract & Overview

Undoped and Nb-doped TiO 2 thin films have been fabricated on glass substrate by RF magnetron sputtering.The morphologic, structural and surface composition of these films before and after annealing in different environments were investigated by atomic force microscopy (AFM) imaging, X-ray diffraction (XRD) and X-ray photoelectron spectroscopy (XPS).The XRD data reveal that the crystallinity is improved when the films are Nb-doped and annealed in H 2 environment.The TiO 2 thin films annealed in H 2 environment exhibit only the anatase phase.The XPS analysis of TiO 2 with Nb indicates the maximum shift in binding energy of the Ti 2p peak.A mechanism for the incorporation of Nb in the TiO 2 lattice has been proposed.

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Tamara Potlog, Petru Dumitriu, Marius Dobromir, Dumitru Luca (2014). XRD and XPS Analysis of TiO2 Thin Films Annealed in Different Environments. Journal of Materials Science and Engineering B, 4(6). https://doi.org/10.17265/2161-6221/2014.06.004

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Potlog, T., Dumitriu, P., Dobromir, M., & Luca, D. (2014). XRD and XPS Analysis of TiO2 Thin Films Annealed in Different Environments. Journal of Materials Science and Engineering B, 4(6). https://doi.org/10.17265/2161-6221/2014.06.004
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